KOREASCHOLAR

3D 형상 측정용 고속/고정밀 멀티프로브 측정시스템 개발 Development of High Speed/High Precision Multi Probe Measurement System for 3D Image Measurement

오연택
  • 언어KOR
  • URLhttp://db.koreascholar.com/Article/Detail/291998
PDF 원문보기
한국기계기술학회지 (韓國機械技術學會誌)
제16권 제6호 (2014.12)
pp.2097-2103
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

The necessity of large-area and high-precision measurements has increased in industry area. The high-speed/high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronized between the probes to measure the same position in the sample. Also this paper shows the measurement results with multi probe measurement system.

키워드
Multi Probe멀티프로브Aspect Ratio종횡비율Chromatic Confocal색수차현미경Mapping맵핑3D Measurement3차원 형상측정
목차
Abstract
 1. 서론
 2. 멀티프로브 측정시스템
  2.1 시스템 개요
  2.2 색수차 현미경
  2.3 CLSM(Confocal laser scanning microscope)
  2.4 엘립소미터
  2.5 이종 프로브를 이용한 측정방법 분석
 3. 프로브 동기화 제어 기술
  3.1 XY 스테이지 Mapping
  3.2 프로브 위치 set up
 4. 결론
 References
저자
  • 오연택(동명대학교 로봇시스템공학과) | Yeon Taek OH