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이온빔 조사방법을 이용한 SiOF 기판상의 수평배향 엘시디 표시소자의 특성에 관한 연구 Study of Homogeneous Alignment LCD Device using Ion-beam Irradiation method on SiOF Substrates

조명현, 김원배, 이호영
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  • URLhttp://db.koreascholar.com/Article/Detail/298860
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한국기계기술학회지 (韓國機械技術學會誌)
제17권 제2호 (2015.04)
pp.335-340
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

Nematic liquid crystal (NLC) alignment effects on SiOF layers via ion-beam(IB) irradiation for four types of incident energy were successfully studied. The effect of fluorine addition on silicon oxide film properties as a function of SiOF₄/O₂gas flow ration was investigated. The SiOF thin film exhibits good chemical and the thermal stability of the SiOF thin film were sustained as function of the NLC alignment until 200℃. Also, the response-time characteristics of aligned LCD based on SiOF film were studied.

키워드
Liquid Crystal액정Ion-beam Irradiation이온빔 조사SiOFx Substrates기판Liquid Crystal Alignment액정배향Homogeneous Alignment수평배향
목차
1. INTRODUCTION
 2. EXPERIMENTS
 3. RESULTS AND DISC USSIO N
 4. CONCLUSIONS
 Acknowledgements
 References
저자
  • 조명현(Member, Seoil University) | Myung-Hyun Cho Corresponding author
  • 김원배(SongWon University) | Won- Bae Kim
  • 이호영(Chodang University) | Ho-Young Lee