유전체 방전 챔버의 출구 압력 균일성을 위한 다구찌 기법 기반의 설계 변수 최적화 Taguchi method for optimization of design parameters based on the outlet pressure uniformity of the plasma discharge chamber
한국기계기술학회지
(韓國機械技術學會誌)
제18권 제1호
(2016.02)
pp.11-17
pp.11-17
한국기계기술학회
(Korean Society of Mechanical Technology)
초록
This paper presents the approach of design parameters optimization based on Taguchi method for the uniformity of outlet pressure in a plasma discharge chamber. The key issue of a plasma discharge chamber is to have the uniformity of outlet pressure which can make a high performance of surface treatment. To extend the length of a outlet from 60mm to 250mm with the uniformity, This study optimally designed the middle holes, outlet width and height, and diameter of the second chamber by using SolidWorks and flow simulation tool. Simulation results demonstrate the validity of the proposed approach.
키워드
저자