나노 스테이지와 볼나사 스테이지에서 커패시티브 센서 실험에 관한 연구 A Study on the Experiment of Capacitive Sensor in Nano and Ball Screw Stage
한국기계기술학회지
(韓國機械技術學會誌)
제20권 제1호
(2018.02)
pp.108-113
pp.108-113
한국기계기술학회
(Korean Society of Mechanical Technology)
초록
The capacitive sensors can be divided into two categories depending on their performance and intended use. First, high resolution sensors are commonly used in displacement and position monitoring applications where high precision, high stability, and low temperature drift are required. Often these sensors are used in process monitoring and closed loop feedback control systems. Second, proximity capacitive sensors are much cheaper and generally used for sensing the presence of parts or for counting applications. The following paper describes characteristics of capacitive sensor and application to the PZT nano and ball screw stage.
목차
1. 서 론
2. 용량 센서와 특성
3. 나노 스테이지 실험
4. 볼나사 스테이지 실험
5. 결 론
후 기
References
2. 용량 센서와 특성
3. 나노 스테이지 실험
4. 볼나사 스테이지 실험
5. 결 론
후 기
References
저자