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실란 플라즈마 방전 중 발생입자 거동과 OES 특성비교
Comparison of Particle Behaviors with OES Characteristics during Silane Plasma Discharge
김연원
Language
ENG
URL
http://db.koreascholar.com/Article/Detail/378855
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해양환경안전학회 학술대회 논문집
2019년도 (사)해양환경안전학회 공동학술대회 (2019.04)
p.114
해양환경안전학회
(The Korean Society Of Marine Environment & Safety)
Keyword
실리콘 클러스터
수소희석
비정질 실리콘 필름
PECVD
Silicon cluster
Hydrogen dilution
amorphous silicon film
PECVD
Author
김연원(목포해양대학교) | Yeonwon Kim (Mokpo National Maritime University)