Programmable Power Supply 소자를 이용한 반도체검사용 장비 DC Parameter 측정에 관한 연구 A Study on DC Parameter Measurement of Equipment for Semiconductor Inspection using Programmable Power Supply Device
한국기계기술학회지
(韓國機械技術學會誌)
제24권 제4호
(2022.08)
pp.739-743
pp.739-743
한국기계기술학회
(Korean Society of Mechanical Technology)
초록
In this study is a study to measure the section by voltage through the high integration of the circuit of the inspection equipment for the power supply circuit of semiconductor equipment. The experiment was conducted by increasing the -1.5∼4 voltage section by 0.5V. At this time, the tolerance was applied to ±0.1%+5mA. Although the voltage increased through the experiment, the accuracy of the measurement data did not change, and it was confirmed through this experiment that the null hypothesis(H0) was adopted in each section through the hypothesis test.
저자