반도체 Wafer 공정용 불산 제어 밸브 모듈 개발에 관한 연구 A Study on the Development of Hydrofluoric Acid Control Valve Module for Semiconductor Wafer Process
pp.750-754
In this study, we intend to develop a control valve with oxidation resistance for hydrogen fluoride that can be applied to the semiconductor production process. Operated Valves currently in use is a form of assembling an air cylinder to the valve body. These valves generally have a cylinder body made of aluminum (Al), so they may corrode depending on the external environment, and the solution leaks along the rod inside the cylinder, causing damage to parts due to corrosion. To solve this problem, the valve plug shape was developed by devising and applying a plug using a valve different from the existing method, and it is possible to block the inflow of hydrogen fluoride into the valve control unit, thereby preventing damage to parts as well as maintaining stable valve operation.