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반도체 AMC 모니터링용 샘플링 테스트 모듈에 관한 연구 A Study on Sampling Test Module for Semiconductor AMC Monitoring

권혁상
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  • URLhttp://db.koreascholar.com/Article/Detail/427134
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한국기계기술학회지 (韓國機械技術學會誌)
제25권 제5호 (2023.10)
pp.855-860
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

The sampling test module of the existing AMC Monitoring System is constructed using tubes and fittings, so there has been a problem with molecular contaminants remaining in the system. This study demonstrated how a new manifold-type sampling test module without connecting tubes and fittings, and with super-hydrophobic coating improves residual molecular contaminants in the AMC Monitoring System through CDA purge when molecular contamination occurs in a clean room with a Semiconductor Fabrication.

키워드
Airborne molecular contamination(공기 중 분자 오염)AMC monitoring system(공기 중 분자 오염 모니터링 시스템)Sampling test module(샘플링 테스트 모듈)Sampling manifold(샘플링 매니폴드)Molecule analyzer(분자 분석기)
저자
  • 권혁상(한성대학교) | Hyuk-Sang Kwon (Ph.D student, Department of Smart Convergence Consulting, Hansung University) Corresponding author