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반도체 AMC 모니터링 시스템용 솔레노이드 밸브 신뢰성 테스트에 관한 연구 A Study on Reliability Test of Solenoid Valve for Semiconductor AMC Monitoring System

권혁상
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  • URLhttp://db.koreascholar.com/Article/Detail/427146
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한국기계기술학회지 (韓國機械技術學會誌)
제25권 제5호 (2023.10)
pp.935-940
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

In the semiconductor manufacturing clean room, contamination that directly affects process yield is managed through the operation of a monitoring system that measures molecular contamination in the air. In this study, I presented the component inspection method, test conditions, and judgment criteria through the life test of the solenoid valve that will be applied to the sampling module of the AMC Monitoring System.

키워드
Airborne molecular contamination(공기 중 분자 오염)AMC monitoring system(공기 중 분자 오염 모니터링 시스템)Molecule analyzer(분자 분석기)Sampling module(샘플링 모듈)Solenoid valve(솔레노이드 밸브)
저자
  • 권혁상 (한성대학교) | Hyuk-Sang Kwon (Ph.D student, Department of Smart Convergence Consulting, Hansung University) Corresponding author