The laser power has been continually increased since the laser was developed in the mid-20th century. Achieving higher laser power requires not only enhancing the cooling performance of laser systems but also addressing the potential degradation of optical characteristics due to thermal deformation induced by laser beam absorption in a mirror. This study delves into the thermal deformation characteristics of mirrors in high-power laser systems. To minimize thermal deformation by heat absorption, Zerodur, known for its low coefficient of thermal expansion, was employed as the mirror material. Various configurations including circular, rectangular, and spline shapes were implemented on a solid mirror structure. Furthermore, two different diameter of a mirror, 300mm and 400mm, were considered to investigate the size effect of the high-power laser beams. Also, three different transmitted beam power were adopted: 50W, 250W, and 500W. Based on the finite element analysis for the thermal deformation, the deformation characteristics of the different types of mirror structures were investigated and analyzed for high-power laser systems.