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광학측정 시 각도변화에 따른 표면거칠기 오차발생에 관한 연구 Study on Occurrence of Error in Surface Roughness Due to Changes in Angle during Optical Measurement

정현석, 최지선
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한국기계기술학회지 (韓國機械技術學會誌)
제26권 제6호 (2024.12)
pp.1424-1428
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

The results of the measurements using an optical surface roughness meter are shown according to the angle changes of 0, 0.5, 1, 1.5, 2, and 3°. Through the experiment, it can be seen that the measurement value is 3.140 at 0°, 3.148 at 0.5°, 3.140 at 1°, 3.151 at 1.5°, 5.078 at 2°, and 4.790 at 3° setting. In addition, the test statistic (P) value is 0.000, which is smaller than the significance level of 0.005, so it was confirmed through the experiment that a measurement error occurs according to the angle change when measuring the surface roughness.

키워드
분산분석검정측정시편검정통계량표면거칠기 ANOVAHypothesisMeasuring specimenP-ValueSurface Roughness
목차
Abstract
1. 서 론
2. 관련이론
    2.1 표면 거칠기 측정이론
    2.2 측정기 구조 및 원리
3. 실험장치 및 방법
3. 결과 및 고찰
4. 결 론
References
저자
  • 정현석(Dept. Semiconductor quality measurement of Korea Polytechnic colleges) | H. S Jung Corresponding author
  • 최지선(Assistant Professor Dept. Semiconductor convergence machine of Korea Polytechnic colleges) | J. S Choi