The capacitive sensors can be divided into two categories depending on their performance and intended use. First, high resolution sensors are commonly used in displacement and position monitoring applications where high precision, high stability, and low temperature drift are required. Often these sensors are used in process monitoring and closed loop feedback control systems. Second, proximity capacitive sensors are much cheaper and generally used for sensing the presence of parts or for counting applications. The following paper describes characteristics of capacitive sensor and application to the PZT nano and ball screw stage.

1. 서 론
 2. 용량 센서와 특성
 3. 나노 스테이지 실험
 4. 볼나사 스테이지 실험
 5. 결 론
 후 기
 References

• 차영엽(Division of Mechanical & Automotive Engineering, Wonkwang University) | Young-Youp Cha Corresponding Author