한국재료학회지 제28권 제11호 (p.627-632)

Residue Free Fabrication of Suspended 2D Nanosheets for in-situ TEM Nanomechanics

키워드 :
graphene,molybdenum disulphide,suspended nanosheet,dry transfer,poly-methyl methacrylate

목차

Abstract
1. Introduction
2. Experimental Details
3. Results and Discussion
4. Conclusions
References

초록

Two dimensional(2D) crystals, composed of a single layer or a few atomic layers extracted from layered materials are attracting researchers’ interest due to promising applications in the nanoelectromechanical systems. Worldwide researchers are preparing devices with suspended 2D materials to study their physical and electrical properties. However, during the fabrication process of 2D flakes on a target substrate, contamination occurs, which makes the measurement data less reliable. We propose a dry transfer method using poly-methyl methacrylate(PMMA) for the 2D flakes to transfer onto the targeted substrate. The PMMA is then removed from the device by an N-Methyl-2-pyrrolidone solution and a critical point dryer, which makes the suspended 2D flakes residue free. Our method provides a clean, reliable and controllable way of fabricating micrometer-sized suspended 2D nanosheets.