In this research, a capacitance pressure sensor with graphene membrane and titanium substrate have been developed and studied as a potential robust substrate and a sensitive membrane material for micromachined devices. Mechanical lamination process combined with micromachining processes have been selected for the fabrication of the pressure sensor. Prior to the fabrication, capacitive pressure sensors based on a graphene diaphragm and titanium substrate have been designed. The fabricated pressure sensor uses a titanium substrate, a graphene film laminated with a floating movable plate, and a fixed surface micromachined back electrode of electroplated nickel. Finite element method is adopted to investigate the residual stresses formed in the process.Also, the out-of-plane strain is calculated under the pressure of the diaphragm. The sensitivity of devices manufactured using these techniques is 7.5 to 4 kPa-1, and the net capacitance change in the range of 0 to 180 kPa is 013 pF.

ABSTRACT
 1. 서 론
 2. 제작 및 실험
 3. 이론적 모델
 4. 박막의 처짐 및 정전용량 측정
 5. 유한요소 해석
 6. 결 과
 5. 결 론
 후 기
 References

• 이흥식(Joongbu University) | H. S. Lee Corresponding Author