한국분말야금학회지 Vol. 27 No. 4 (p.293-299)

W-WC의 Spark Plasma Sintering에 의한 W2C의 합성 및 식각특성

Synthesis of W2C by Spark Plasma Sintering of W-WC Powder Mixture and Its Etching Property
키워드 :
Tungsten carbide W2C,Spark plasma sintering,Reaction-sintering,Etching property

목차

Abstract
1. 서 론
2. 실험방법
   2.1 W-WC 혼합분말 제조
   2.2 방전 플라즈마 소결
   2.3 W2C 시편의 식각특성 분석
3. 결과 및 고찰
4. 결 론
References

초록

W2C is synthesized through a reaction-sintering process from an ultrafine-W and WC powder mixture using spark plasma sintering (SPS). The effect of various parameters, such as W:WC molar ratio, sintering temperature, and sintering time, on the synthesis behavior of W2C is investigated through X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM) analysis of the microstructure, and final sintered density. Further, the etching properties of a W2C specimen are analyzed. A W2C sintered specimen with a particle size of 2.0 μm and a relative density over 98% could be obtained from a W-WC powder mixture with 55 mol%, after SPS at 1700℃ for 20 min under a pressure of 50 MPa. The sample etching rate is similar to that of SiC. Based on X-ray photoelectron spectroscopy (XPS) analysis, it is confirmed that fluorocarbon-based layers such as C-F and C-F2 with lower etch rates are also formed.