Heavy water primary system decontamination technology is essential to reduce worker exposure and improve safety during maintenance and decommissioning of nuclear facilities. Advanced decontamination technology development aims to secure controlled decontamination technologies that can reduce the cost of radiation exposure and dramatically reduce the amount of secondary waste generated when decontaminating large equipment and large-area facilities. We conducted a study to identify candidate corrosion inhibitors through the literature and analyze the degree of corrosion of carbon steel samples. Countries with advanced nuclear technology have developed chemical decontamination technology for the entire nuclear power generation system and applied it to the dismantling and maintenance of nuclear power plants. In the decontamination process, the corrosion oxide film must be removed. If the base metal is corroded by the decontaminant in this process, additional secondary waste is generated and treatment costs increase. Therefore, it is necessary to develop a corrosion inhibitor that inhibits the corrosion of the carbon steel base metal in the decontamination process to generate a secondary waste liquid that is favorable for waste reduction and treatment. In this presentation, a study was conducted to analyze the extent of corrosion on a carbon steel base material and identify candidate materials for corrosion inhibition testing. Samples were analyzed using optical microscopy and EPMA analysis to determine the thickness of the corroded oxide film. EPMA analysis also allowed us to map the elemental distribution of the carbon steel corrosion layer, which we plan to quantify in the future. The candidate materials for organic-based corrosion inhibitor were also selected based on their inhibition mechanism; having high electronegative elements for coordinate covalent bonding at metal surface and hydrophobic nonpolar group for preventing access of corrosive substances.The selection of candidate materials for corrosion inhibition testing was based on the mechanism of the corrosion inhibitor. Organic-based corrosion inhibitors are adsorbed by donor-acceptor interactions between metal surfaces and highly electronegative elements. Corrosion can also be inhibited by arranging hydrophobic nonpolar groups on metal surfaces in the solution direction to prevent access of corrosive substances.