Recently, with the development of ultra-precision technology, the quality improvement of optical parts and various products is emerging. The need for a difficult-to-cut material that is light and exhibits high hardness and high strength physical properties is being emphasized. Ultra-precision machining processing solutions for these difficult-to-cut materials are being actively developed. In this research, experiments were performed using a DTM machine equipped with a laser-assisted machining module for ultra-precision machining of CaF2 materials that are brittle but exhibit high transmittance in a wide range from ultraviolet to infrared.

In this paper, we describe experiment results using a vibration assisted hybrid femtosecond laser (λ:795 nm) ultra- precision machining system. The hybrid system we have developed is possible that optical focal point of the femtosec- ond laser constantly and frequently within the range of PZT(piezoactuator) vibrator working distance. Using the hybrid system, We have experimented on brass and studied about differences of result of hole aspect ratio compare to general experiment setup of femtosecond laser system. Aspect ratio of a micro hole on brass is increased as 54% with 100 Hz vibration frequency and surface roughness of the side wall also improved compare to non-vibration.