In this study, a micro gas sensor for NOx was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about 2mm×2mm. Indium oxide as a sensing material for the NOx gas was synthesized by a sol-gel process. The particle size of synthesized In2O3 was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance (Rs=Rgas/Rair), occurred at 300˚C with a value of 8.0 at 1 ppm NO2 gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the NO2 gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

Recently, many MEMS manipulator or mechanisms have been developed for application in nanotechnology and optical sensors. In this paper, the method that is measurement and analysis of the motion-ability is introduced for 1 degree of freedom MEMS Manipulator. To do this, the MEMS manipulator is fabricated on the SOI wafer. It is comprised of a parallel bi-lever flexure mechanism and a bent-beam thermal actuator. The flexure mechanism is comprised of an actuator input stage, four lever arms, ten circular flexure hinges, and an output stage. Each flexure hinge provides a point of compliance and acts similar to a rotational joint with an attached rotational spring. These components are significantly stiffer than the flexure hinges, so that they act as rigid bodies in the plane of motion. The static and dynamic parameters of fabricated manipulator are measured and analysis by 3D optical profiling system. It contains a CCD camera, a field-of-view (FOV) lens, a filter assembly, and an illumination source. Light from the illuminator travels through the system and is reflected down to the objective by a beamsplitter. Once the light reaches the objective, another beamsplitter separates the light into two beams. One beam, the reference beam, reflects form a super smooth reference mirror in the objective, while the other reflects form the surface of the sample and back to the objective. With this system, we can measure and analyze the resolution, accuracy, precision, stability and responsibility of MEMS manipulator and it is very useful for fabrication or application of improved manipulator without surface damage.

Spring constants (displacement per unit applied load) of MEMS socket pins of given structures were computed by theoretical analysis and confirmed by the finite element method (FEM). In the theoretical analysis, the displacement of pins was calculated based on the 2-dimensional bending theory of the curved beam. For the 3-dimensional modeling, CATIA was used. After modeling, the raw data were transferred to ANSYS, which was employed in the 3-dimensional analysis for the calculation of the stress and strain and loaddisplacement The theoretical analysis and the FEM results were found to agree, with each showing the spring constants as 63.4 N/m within a reasonable load range. These results show that spring constants can be easily obtained through theoretical calculation without resorting to experiments and FEM analysis for simple and symmetric structures. For the some change of shape and structural stiffness, this theoretical analysis can be applied to MEMS socket pins.

A non-equilibrium powder metallurgy processing such as an MA/SPS (Mechanical Alloying / Spark Plasma Sintering) process is examined in a Ti-48moll%Al. TiAl intermetallic compound is a potential light-weight/high-temperature structural material. One of the major problems, however, limiting the practical use of the material is its poor workability. From this point, the powder metallurgy (PM) processing route has been attractive alternative of the conventional processing for such material The MA/SPS process is able to apply to a LIGA process. Optimization of the pseudo-superplasticity enables to fabricate micro-parts made of fine grained ceramics composites of TiAl by the LIGA process.

마이크로 머신 소자는 일반전자 소자와 달리 소자 자체에 미세한 기계적 구조물을 갖고 있으며, 이의 구동을 통하여 센서 또는 엑츄에이터의 기능을 갖게 된다. 이 소자들은 그 작동 요구특성에 따라 패키지의 기계적, 환경적 격리를 요구하거나 분위기조절이 요구되는 등 까다로운 패키지 특성을 필요로 한다. 또한 미세한 작동소자들로 인하여 열 및 열응력에 매우 민감하며, 패키지방법에 따라 구동부위의 작동 특성이 크게 변화할 수 있다. 본 연구에서는 마이크로 머신 소자가 패키지 상에 접촉되어 패키지 될 때, 소자의 접촉 재료 및 공정온도, 크기 등이 마이크로 머신 소자에 미치는 열응력을 연구하였다. 유한요소해석법을 사용하여 소자에 미치는 열응력과 이로 인한 마이크로머신 소자의 물리적 변형을 예측하고, 이를 통하여 마이크로 머신 소자 패키지에 최소한의 열응력을 미치는 소자접속 재료의 선별과 패키지 설계의 최적화를 이루고자 하였다.

본 연구에서는 MEMS 기반 3축 가속도 센서 모듈을 제작하여 성능 시험을 수행하였고, 지진 모니터링 시스템을 구성하였다. 3축 가속도 센서 모듈의 성능 향상을 위하여 데이터 수집장치를 24bit ADC (Analog to Digital Converter)가 내장된 NI-9239를 사용하였고, 잡음을 줄이기 위해 100Hz LPF (Low Pass Filter)를 통과시킨 데이터를 사용하였다. 또한 지진 모니터링 소프트웨어를 개발하여 구조물에 유의한 진동을 감지하는데 초점을 맞추었다. 진동을 감지하기 위한 방법으로 각 축의 가속도 크기 뿐만 아니라 3축 가속도의 벡터 합을 구하여 이 벡터 합이 미리 설정한 값을 초과할 때의 수치를 별도로 표시하고 이를 파일로 저장하는 알고리즘을 사용하였다.

This paper presents a sensitivity optimization of a MEMS (microelectromechanical systems) gyroscope for a magnet-gyro system. The magnet-gyro system, which is a guidance system for a AGV (automatic or automated guided vehicle), uses a magnet positioning system and a yaw gyroscope. The magnet positioning system measures magnetism of a cylindrical magnet embedded on the floor, and AGV is guided by the motion direction angle calculated with the measured magnetism. If the magnet positioning system does not measure the magnetism, the AGV is guided by using angular velocity measured with the gyroscope. The gyroscope used for the magnet-gyro system is usually MEMS type. Because the MEMS gyroscope is made from the process technology in semiconductor device fabrication, it has small size, low-power and low price. However, the MEMS gyroscope has drift phenomenon caused by noise and calculation error. Precision ADC (analog to digital converter) and accurate sensitivity are needed to minimize the drift phenomenon. Therefore, this paper proposes the method of the sensitivity optimization of the MEMS gyroscope using DEAS (dynamic encoding algorithm for searches). For experiment, we used the AGV mounted with a laser navigation system which is able to measure accurate position of the AGV and compared result by the sensitivity value calculated by the proposed method with result by the sensitivity in specification of the MEMS gyroscope. In experimental results, we verified that the sensitivity value through the proposed method can calculate more accurate motion direction angle of the AGV.

본 논문에서는 소형 선박용 관성측정장치(Inertial Measurement Unit, IMU) 개발에 적합한 MEMS(Micro-Electro Mechanical System) 기반의 관성 센서 평가와 선정에 관하여 기술했다. 먼저, 오일러 공식에 기초한 관성 센서의 오차 모델과 잡음 모델을 정의하고, 앨런 분산(Allan Variance) 기법과 몬테카르로(Monte Carlo) 시뮬레이션 기법을 도입하여 관성 센서를 평가하였다. ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH, ADXL103 등 다섯 가지 관성 센서에 대한 평가결과, ADIS16405의 자이로와 가속도계를 조합한 경우 오차가 가장 작게 나타났는데, 600 초 경과시 속도 오차의 표준편차가 약 160 m/s, 위치 오차의 표준편차가 약 35 km로 나타났다. 평가를 통해 ADIS16405 관성 센서가 IMU 구축에 최적임을 알았고, 이러한 오차 감소 방법에 대해서 참고문헌을 조사하여 검토하였다.