Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cleanroom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particlesand bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies such as precision machines and electrical parts essentially have industrial cleanroom facilities and clean technologies to produce defects free products due to particles.Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of submicro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

In this study, we improved the water-based condensation particle counter in Atmospheric Research Aircraft NARA and investigated the condensation particle number concentration over the Korean peninsula. Pump and set point information were changed to improve the instrument used by aircraft for observation. Ground-based observational result showed that the error between two instruments, which are water-based condensation particle counter and butanol-based condensation particle counter, was 4.7%. Aerial observational result revealed that the number concentration before improvement indicate large variation with unstable condition, whereas the number concentration after improvement indicate a reasonable variation. After improvement, the number concentration was 706±499 particle/㎤ in the West Sea and 257±80 particle/㎤ in Gangwon-do, and these are similar to the concentration range reported in previous studies. Notably, this is the first attempt to use aerial observation with water-based condensation particle counter to investigate condensation particle number concentration.

The characteristics for the aerosol number distribution was studied during spring, 2004 in Incheon. Optical Particle Counter (OPC, HIAC/ROYCO 5230) was used in order to measure the number concentration of aerosol in the range of 0.3～25㎛. The obtained results were compared with PM2.5 and PM10 data during Asian dust events. The results show that the size resolved aerosol number concentration from OPC measurement has a similar tendency with PM10 and PM2.5 mass concentration. During Asian dust periods, the number concentrations in large particle (CH5～CH8) increase more than small particles which diameter is less than 2.23㎛(CH5) and the same results were shown when PM10 was compared with PM2.5 data compared with non-dust days, Consequently, this study shows that size resolved aerosol number concentration from OPC measurement can be used as a useful tool in comparison of mass concentration data.