The objective of this research is to evaluate a feasibility of wastewater reuse by membrane treatment with vibrating membrane separation equipment. Molecular weight of compounds in wastewater, permeability of membrane and retentate characterization after membrane filtration were investigated in order to determine appropriate membrane pore size and materials for wastewater treatment. Selected membrane was evaluated with vibration membrane separation equipment to optimize operating conditions. The following conclusion are drawn. 1.We got as following test results after the distribution of particles in the semiconductor wastewater, are made up of 1～20㎛. Si, gold and Al in turn are contained in semiconductor wastewater. 2. Recovery rate is changeless under increasing recovery rate in operation. Though a value can be if pressure can be changed, the highest value of permeate rate is presented in 150 psi. 3.The AS-100(polysulpone) was selected as the most appropriate membranes for the treatment of semiconductor wastewater to VSEP system. The fouling almost did not occur during this experiments. The analyses of treated water with VSEP system showed conductivity:0.059㎲/cm, TDS:40㎎/ℓ, COD:20㎎/ℓ, SS:5㎎/ℓ, n-Hexane:8.3㎎/ℓ. Comparing previous systems, operating expenses is decreased by more 50%.