The purpose of this study is to investigate information on performance of ventilation in high-tech microelectronicscleanrooms using computational fluid dynamics (CFD). One liquid crystal display (LCD) company was examinedfor evaluating the relationship between workplace concentration and ventilation rate efficiency by using CFDsoftware, Airpak 3.0v. Acetone concentration in cleanroom for final packing process, which is inspected LCD was40.1ppm (GSD 1.91) (n=55) as geometric mean, ranged 7.8~128.7ppm and weakly correlated with ventilationrate efficiency (R²=0.37, p<0.01). Resulting from computational fluid dynamics (CFD), acetone concentrationcan be reduced 62% when install booth type local exhaust system, the most efficient way among 10 other differentventilation methods like increasing volume of general ventilation, changing the location of workers, supply orexhaust diffusers and install downstream type local exhaust system, etc. We found that volitile organic compoundsin cleanroom can be a matter of adverse health effects and the concentration was correlated with ventilation rateefficiency. The most optimized plan to control the contaminants in solvent cleaning work in cleanroom was boothtype local exhaust system.

Industrial ventilation is a crucial engineering measure to protect workers from hazardous airborne contaminants. Designing a ventilation system is not an easy task. To solve this problem, many U. S. computer programs and softwares have been developed. In Korea, asoftware, called as VPMC, was developed by Korea Industrial Safety Corporation. But VPMC could not stand alone since it can be used to design not a hood, but a ventilation system. In this research, therefore, a preprocessing software was developed. It can be used to design general ventilation system, canopy hood, open surface tank hood. The program was written in Microsoft Visual Basic. In near future, this software will be incorporated into a total package software which can be used to design a whole ventilation system.