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차세대 웨이퍼 생산시스템에서의 실시간 스케줄링 시스템 아키텍처 KCI 등재
A Real-Time Scheduling System Architecture in Next Generation Wafer Production System
이현, 허선, 박유진, 이건우, 조용주
- 언어KOR
- URLhttps://db.koreascholar.com/Article/Detail/22719
4,000원
한국산업경영시스템학회지
(Journal of Society of Korea Industrial and Systems Engineering)
Vol. 33 No. 3 (2010.09)
pp.184-191
pp.184-191
한국산업경영시스템학회
(Society of Korea Industrial and Systems Engineering)
초록
In the environment of 450mm wafers production known as the next-generation semiconductor production process, one of the most significant features is the full automation over the whole manufacturing processes involved. The full automation system for 450mm
키워드
Semiconductor450mm Wafer ProductionReal-time SchedulingManufacturing Execution System
저자
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