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반도체 포토공정에서 총 가중작업흐름시간을 최소화하기 위한 스케쥴링 방법론에 관한 연구 KCI 등재
Scheduling Algorithms for Minimizing Total Weighted Flowtime in Photolithography Workstation of FAB
한국산업경영시스템학회지
(Journal of Society of Korea Industrial and Systems Engineering)
Vol. 35 No. 1 (2012.03)
pp.79-86
pp.79-86
한국산업경영시스템학회
(Society of Korea Industrial and Systems Engineering)
초록
This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the ph
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