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Visual Servo Control of Micro Objects using Interference Microscope

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한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

This paper presents a method of measuring the 6 DOF motion of a micro object using images taken of interference fringes projected onto the object. Information from the fringe patterns allows for extracting the 6 DOF motion of the object in one image, allowing for real time measurement of the object's pose. This measurement technique is applied to a visual servo control scheme where the object's 6 DOF motion is controled. Experimental results of the developed system are presented.

목차
Abstract
 1. 서론
 2. 6자유도 측정
 3. 서보 제어
 4. 실험 결과
 5. 결론
 참고문헌
저자
  • 김정현(경성대학교 메카트로닉스공학과) | Jung Hyun Kim