Visual Servo Control of Micro Objects using Interference Microscope
This paper presents a method of measuring the 6 DOF motion of a micro object using images taken of interference fringes projected onto the object. Information from the fringe patterns allows for extracting the 6 DOF motion of the object in one image, allowing for real time measurement of the object's pose. This measurement technique is applied to a visual servo control scheme where the object's 6 DOF motion is controled. Experimental results of the developed system are presented.