This paper studies the optimum design of piezo-driven compliant motion stage. The flexure hinge for designing motion amplification structures has been widely used on conventional piezo stages. The novel 'cross hinge' is more flexible than the flexure hinge, allowing for large motion amplification and less resistance to motion which is ideal for a compliant motion stage. As simulation results, the newly designed stage has superior performance over traditionally designed stages in terms of motion amplification, allowing for larger motion ranges.

Abstract
 1. 서론
 2. Stage의 구조 및 특성
  2.1 Stage의 기계적 구조
  2.2 Cross Hinge와 Flexure Hinge
 3. Ansys를 이용한 최적화 설계
  3.1 최적화 조건
  3.2 최적화 결과
 4. 결론
 참고문헌

• 김정현(경성대학교 메카트로닉스공학과) | Jung Hyun Kim