Nanosized WC and WC-Co powders were synthesised by chemical vapor condensation(CVC) process using the pyrolysis of tungsten hexacarbonyl(W(CO)) and cobalt octacarbonyl(Co(CO)). The microstructural changes and phase evolution of the CVC powders during post heat-treatment were studied using the XRD, FE-SEM, TEM, and ICP-MS. CVC powders were consisted of the loosely agglomerated sub-stoichimetric WC and the long-chain Co nanopowders. The sub-stochiometric CVC WC and WC-Co powders were carburized using the mixture gas of CH-H in the temperature range of 730-85. Carbon content of CVC powder controlled by the gas phase carburization at 85 was well matched with the theoretical carbon sioichiometry of WC, 6.13 wt％. During the gas phase carburization, the particle size of WC increased from 20 nm to 40 nm and the long chain structure of Co powders disappeared.

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