In this paper, we describe experiment results using a vibration assisted hybrid femtosecond laser (λ:795 nm) ultra- precision machining system. The hybrid system we have developed is possible that optical focal point of the femtosec- ond laser constantly and frequently within the range of PZT(piezoactuator) vibrator working distance. Using the hybrid system, We have experimented on brass and studied about differences of result of hole aspect ratio compare to general experiment setup of femtosecond laser system. Aspect ratio of a micro hole on brass is increased as 54% with 100 Hz vibration frequency and surface roughness of the side wall also improved compare to non-vibration.

• 최원석(ano Machining Lab., KIMM (Korea Institute of Machinery & Materials), Department of Nano-Mechatronics, UST(University of Science and Technology)) | Won-Suk Choi
• 윤지욱(ano Machining Lab., KIMM (Korea Institute of Machinery & Materials), Department of Nano-Mechatronics, UST(University of Science and Technology)) | Ji-Wook Yoon
• 조성학(Nano Machining Lab., KIMM (Korea Institute of Machinery & Materials), Department of Nano-Mechatronics, UST(University of Science and Technology)) | Sung-Hak Cho Corresponding Author
• 강명창(National Core Research Center for Hybrid Materials Solution) | Myung-Chang Kang Corresponding Author