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Semiconductor Sensor for Detecting Freshness of Sea Foods

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  • URLhttps://db.koreascholar.com/Article/Detail/256013
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수산해양기술연구 (Journal of the Korean Society of Fisheries and Ocean Technology)
한국수산해양기술학회(구 한국어업기술학회) (The Korean Society of Fisheriers and Ocean Technology)
초록

The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 300℃ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.

저자
  • 박성현 | Bak, Sung-Hyun
  • 권태하 | Kwon, Tae-Ha