Because of the result of a large use of electronic equipments, the occupation density of microwave frequency band is highly increased, and electromagnetic environment is getting more seriously bad. It is sometimes reported that electronic machines are not normally operated on account of the influence of undesired electromagnetic wave, which often gives fatal blow to even human life and thus becomes serious social problems. OATS(Open Area Test Site) is principally used to measure EMI or examine elelctromagnetic emission. Because of various restrictions we often build semi-anechoic chamber which has the function of OATS to measure EMI or EMS other than OATS. If the difference of the site attenuation between semi-anechoic chamber and OATS is within ±3dB, the semi-anechoic chamber is recognized as adequate facility to measure EMI or EMS. Accordingly authors evaluate and analyze site attenuation due to absorbent materials, polarization, mutual coupling effects, etc. The calculated and the measured site attenuation in semi-anechoic chamber are compared. As a result good agreement is obtained.