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방전 플라즈마 소결에 의한 Ge2Sb2Te5 스퍼터링 타겟 제조 및 특성 KCI 등재

Synthesis and Properties of a Ge2Sb2Te5 Sputtering for Use as a Target by Spark Plasma Sintering

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한국분말야금학회지 (Journal of Korean Powder Metallurgy Institute)
한국분말재료학회(구 한국분말야금학회) (Korean Powder Metallurgy Institute)
초록

In this study, we report the sintering behavior and properties of a Ge2Sb2Te5 alloy powders for use as asputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature andtime, on the density and hardness of the target has been investigated in detail. Structural characterization was performedby scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differentialscanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered Ge2Sb2Te5 materialswere 5.8976~6.3687 g/cm3 and 32~75 Hv, respectively.

저자
  • 방창욱(연세대학교 신소재공학과) | C. W. Bang
  • 김기범(세종대학교 나노신소재공학과) | K. B. Kim
  • 이진규(공주대학교 신소재공학부) | J. K. Lee Corresponding Author