We developed a 3D simulation model of microstructure evolution of vertically aligned porous structure due to phase separation during film growth. The model proves its validity by reproducing the results of previous researches which are topological features of the microstructures and effects of varied processing parameters. The model will be extended by including bulk diffusion effect and elastic effect.

• 김동욱 | Kim Dong-Uk
• 변지영 | Byun Ji-Young
• 차필령 | Cha Pil-Ryung