We present the detection characteristics of nitrogen monoxide(NO) gas using p-type copper oxide(CuO) thin film gas sensors. The CuO thin films were fabricated on glass substrates by a sol-gel spin coating method using copper acetate hydrate and diethanolamine as precursors. Structural characterizations revealed that we prepared the pure CuO thin films having a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the NO gas sensin measurements that the p-type CuO thin film gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as 100 oC. Additionally, these CuO thin film gas sensors were found to show reversible and reliable electrical response to NO gas in a range of operating temperatures from 60 oC to 200 oC. It is supposed from these results that the ptype oxide semiconductor CuO thin film could have significant potential for use in future gas sensors and other oxide electronics applications using oxide p-n heterojunction structures.

Abstract
 1. 서 론
 2. 실험 방법
 3. 결과 및 고찰
 4. 결 론
 Acknowledgement
 References

• 황현정(충남대학교 차세대기판학과) | Hyeonjeong Hwang
• 김효진(충남대학교 차세대기판학과, 충남대학교 공과대학 재료공학과) | Hyojin Kim Corresponding author
• 김도진(충남대학교 차세대기판학과, 충남대학교 공과대학 재료공학과) | Dojin Kim