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pp.371-376
We report on the effects of TiO2 doping power on the characteristics of multicomponent TiO2-ITO (TITO) electrodes prepared by a multi-target sputtering system with tilted cathode guns. Both as-deposited and annealed TITO electrodes showed linearly increased sheet resistance and resistivity with increasing TiO2 doping power. However, the TITO electrodes exhibited a fairly high optical transmittance regardless of the TiO2 doping power due to the high transparency of the TiO2. Although the annealed TITO showed much lower sheet resistance and resistivity relative to the as-deposited samples, the electrical properties of the annealed samples exhibited similar dependence on the TiO2 power to the as-deposited samples. In addition, it was found that doping of an anatase TiO2 in the ITO electrode prevented the preferred (222) orientation of the TITO electrodes. Although the TITO electrode showed higher sheet resistance and resistivity than that of the pure ITO electrode, it offers a very smooth surface and usage of a low-cost Ti element. It is thus considered a promising multicomponent transparent conducting electrode for cost-efficient flat panel displays and photovoltatics.
