We present an easy method of preparing two-dimensional (2D) periodic hollow tin oxide (SnO2) hemisphere array gas sensors using polystyrene (PS) spheres as a template. The structures were fabricated by the sputter deposition of thin tin (Sn) metal over an array of PS spheres on a planar substrate followed by calcination at an elevated temperature to oxidize Sn to SnO2 while removing the PS template cores. The SnO2 hemisphere array structures were examined by scanning electron microscopy and X-ray diffraction. The structures were calcined at various temperatures and their sensing properties were examined with varying operation temperatures and concentrations of nitric oxide (NO) gas. Their gas-sensing properties were investigated by measuring the electrical resistances in air and the target gases. The measurements were conducted at different NO concentrations and substrate temperatures. A minimum detection limit of 30 ppb, showing a sensitivity of S = 1.6, was observed for NO gas at an operation temperature of 150˚C for a sample having an Sn metal layer thickness corresponding to 30 sec sputtering time and calcined at 600˚C for 2 hr in air. We proved that high porosity in a hollow SnO2 hemisphere structure allows easy diffusion of the target gas molecules. The results confirm that a 2D hollow SnO2 hemisphere array structure of micronmeter sizes can be a good structural morphology for high sensitivity gas sensors.

• Hoang, Nhat Hieu(Department of Materials Science and Engineering, Chungnam National University)
• Nguyen, Minh Vuong( Department of Materials Science and Engineering, Chungnam National University) | Nguyen, Minh Vuong
• Kim, Dojin( Department of Materials Science and Engineering, Chungnam National University) | Kim, Dojin