4H- and 6H-SiC grown by physical vapor transport method were investigated by transmission electron microscopy (TEM). From the TEM diffraction patterns observed along the [11-20] zone axis, 4H- and 6H-SiC were identified due to their additional diffraction spots, indicating atomic stacking sequences. However, identification was not possible in the [10-10] zone axis due to the absence of additional diffraction spots. Basal plane dislocations (BPDs) were investigated in the TEM specimen prepared along the [10-10] zone axis using the two-beam technique. BPDs were two Shockley partial dislocations with a stacking fault (SF) between them. Shockley partial BPDs arrayed along the [0001] growth direction were observed in the investigated 4H-SiC. This arrayed configuration of Shockley partial BPDs cannot be recognized from the plan view TEM with the [0001] zone axis. The evaluated distances between the two Shockley partial dislocations for the investigated samples were similar to the equilibrium distance, with values of several hundreds of nanometers or even values as large as over a few micrometers.

• Myoungho Jeong(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST))
• Dong-Yeob Kim(Department of Materials Science and Engineering, Chungnam National University)
• Soon-Ku Hong(Department of Materials Science and Engineering, Chungnam National University) Corresponding author
• Jeong Yong Lee(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST))
• Im Gyu Yeo(Hybrid Materials Research Department, RIST)
• Tai-Hee Eun(Hybrid Materials Research Department, RIST)
• Myoung-Chuel Chun(POSCO Center)