We synthesized YOF(yttirum oxyfluoride) powders through solid state reactions using Y2O3 and YF3 as raw materials. The synthesis of crystalline YOF was started at 300 oC and completed at 500 oC. The atmosphere during synthesis had a negligible effect on the synthesis of the YOF powder under the investigated temperature range. The particle size distribution of the YOF was nearly identical to that of the mixed Y2O3 and YF3 powders. When the synthesized YOF powders were used as a raw material for the suspension plasma spray(SPS) coating, the crystalline phases of the coated layer consisted of YOF and Y2O3, indicating that oxidation or evaporation of YOF powders occurred during the coating process. Based on thermogravimetric analysis, the crystalline formation appeared to be affected by the evaporation of fluoride because of the high vapor pressure of the YOF material.