Membrane-based CO2 capture is an energy-saving way to separate CO2 from N2 in post-combustion. Chabazite (Si-CHA) zeolites with a pore size of 0.37 nm × 0.42 nm are expected to separate CO2 from larger N2 (0.364 nm) by recognizing minute size differences. The pore mouth size on the Si-CHA zeolites outer surface was reduced via the chemical vapor deposition (CVD) to increase the molecular sieving effect by disfavoring the penetration of N2. The CVD process was conducted on CHA membranes to improve their CO2/N2 separation performance. Compared to the intact CHA membranes, the CO2/N2 max separation factor for CVD-treated CHA membranes increased by ~2.5 fold under dry conditions and by ~6.4 fold under wet conditions. It is noteworthy that the membrane kept its separation performance without degradation in the presence of H2O.