‘Upper bound’ is very well known notion in membrane field, which explains the trade-off relationship between permeability and selectivity in gas pairs. Many researches have worked on overcoming the current limitation in order to develop cost-effective and energy-efficient membrane system. Thus, understanding the intrinsic material properties (permeation, diffusivity and solubility) are prerequisite to set the strategy how to get over the upper bound. In this study, we introduced Quartz crystal microbalance to measure diffusion coefficient and compare the results to apparent diffusivity value obtained from the high-vauum time lag method. We consider the quartz type, temperature and pressure effect on diffusion coefficient and also characterize defect density of deposited film.