This research focuses on a scheduling problem in the semiconductor probing facility. Probing facility is composed of identical parallel machines and the parallel machines form three workstations for the tests with different recipes. Each machine can be set to three different tests and sequence-dependent setup times are required between operations due to temperature and probe card loading/unloading. Precedence relationship exists between three tests of each wafer lot. The scheduling problem for the probing facility is a parallel machine scheduling problem with precedence relationship and sequence dependent setup time. We develop heuristic algorithm to minimize makespan for the scheduling problem and numerical experiments are conducted to evaluate the performance.

• 조성준(한국과학기술원 산업및시스템공학과, Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology) | Seong-Jun Cho
• 방준영(성결대학교 산업경영공학부, Department of Industrial and Management Engineering, Sungkyul University) | June-Young Bang