The relative contributions of physical and chemical processes to the production of ozone (O3) were evaluated based on an integrated process rate (IPR) analysis using the MM5/CMAQ in a downtown (i.e., Yangsan_U) and suburban area (i.e., Ungsang) on high ozone days during spring and summer in 2006 (28 April and 8 August 2006). The IPR includes a horizontal advection (HADV) and diffusion (HDIF), a vertical advection (ZADV) and diffusion (VDIF), a dry deposition (DDEP), and a chemistry (CHEM). The VDIF in Yangsan_U was found to be the most dominant contributor (29.5% in spring and 32.1% in summer) to high O3 concentrations, followed by the HADV and ZADV. In contrast, the contributions of the HADV (40.3% in spring and 32.3% in summer) in Ungsang were significantly higher than those of VDIF and ZADV. Moreover, O3 production due to the chemical effect in the two areas (especially in Ungsang) during summer was found to be moderately higher than that during spring.