Highly self-cleaning thin films of TiO2-SiO2 co-doped with Ag and F are prepared by the sol-gel method. The asprepared thin films consist of bottom SiO2 and top TiO2 layers which are modified by doping with F, Ag and F-Ag elements. XRD analysis confirms that the prepared thin film is a crystalline anatase phase. UV-vis spectra show that the light absorption of Ag-F-TiO2/SiO2 thin films is tuned in the visible region. The self-cleaning properties of the prepared films are evaluated by a water contact angle measurement under UV light irradiation. The photocatalytic performances of the thin films are studied using methylene blue dye under both UV and visible light irradiation. The Ag-F-TiO2/SiO2 thin films exhibit higher photocatalytic activity under both UV and visible light compared with other samples of pure TiO2, Ag-doped TiO2, and F-doped TiO2 films.