Removal of Metallic Cobalt Layers by Reactive Cold Plasma - koreascholar

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Removal of Metallic Cobalt Layers by Reactive Cold Plasma

Yong-SooKim, Sang-HwanJeon, Byung-JooYim, Hyo-CheolLee, Jong-HeonJung, Kye-NamKim

언어ENG
URLhttps://db.koreascholar.com/Article/Detail/383633

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한국방사성폐기물학회 학술논문요약집 (Abstracts of Proceedings of the Korean Radioactive Wasts Society)

한국방사성폐기물학회 학술논문집 - 2004년 봄 - (2004.06)
pp.32-42

한국방사성폐기물학회 (Korean Radioactive Waste Society)

키워드

Decontamination Cobalt-Layer Plasma Surface Cleaning Ion-Assisted Etching

저자

Yong-SooKim(Hanyang University)
Sang-HwanJeon(Hanyang University)
Byung-JooYim(Hanyang University)
Hyo-CheolLee(Hanyang University)
Jong-HeonJung(Korea Atomic Energy Research Institute)
Kye-NamKim(Korea Atomic Energy Research Institute)

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