We study substrate support structures and materials to improve uptime and shorten preventive maintenance cycles for chemical vapor deposition equipment. In order to improve the rolling of the substrate support, the bushing device adopts a ball transfer method in which a large ball and a small ball are mixed. When the main transfer ball of the bushing part of the substrate support contacts the substrate support, the small ball also rotates simultaneously with the rotation of the main ball, minimizing the resistance that can be generated during the vertical movement of the substrate support. As a result of the improvement, the glass substrate breakage rate is reduced by more than 90 ~ 95 %, and the equipment preventive maintenance and board support replacement cycles are extended four times or more, from once a month to more than four months, and the equipment uptime is at least 15 % improved. This study proposes an optimization method for substrate support structure and material improvement of chemical vapor deposition equipment.

Abstract
1. 서 론
2. 실험 방법
3. 결과 및 고찰
    3.1 기판 지지대의 구조 최적화
    3.2 기판 지지대의 재질 최적화
4. 결 론
References

• 김원경(경북대학교 나노소재공학부) | Won Kyung Kim (School of Nano & Materials Science and Engineering, Kyungpook National University) Corresponding author
• 우람(인제대학교 나노융합공학부) | Ram Woo (School of Nano Engineering, Inje University)