EMI(Electro Magnetic Interference) is a very important factor to consider in electronic equipment. For EMI coating, it is applied to the sputtering electronic equipment housing made by PEEK. The question arises that there may be physical changes in the PEEK material due to heat generated during sputtering. During sputtering inside the chamber, the degree of temperature due to the heat was measured indirectly, and characteristics such as bending capacity, tensile strength, impact strength, flexural strength were measured to understand physical changes. Tensile strength and the flexural strength increased by 14.5 to 18 compared to the base group. And the impact strength of the un-notched specimens was increased. Overall, there has been no change in the physical properties of PEEK due to heat generated during sputtering deposition.

ABSTRACT
 1. 서 론
 2. 이론적 배경
  2.1 스퍼터링(Sputtering) 공정
 3. 시험조건 및 방법
  3.1 시험 개요
  3.2 시편 설정
  3.3 열 변형 확인 시험
  3.4 강도 측정 시험
 4. 시험결과 및 분석
  4.1 열변형 확인 시험 결과
  4.2 강도 측정 시험 결과
 4. 결 론
 References

• 최시영(Defense Agency for Technology and Quality) | Si-Young Choi Corresponding Author
• 정찬만(Defense Agency for Technology and Quality) | Chan-Man Jeong
• 이호준(Defense Agency for Technology and Quality) | Ho-Jun Lee
• 신태성(Defense Agency for Technology and Quality) | Tae-Sung Shin
• 임상진(Defense Agency for Technology and Quality) | Sang-Jin Lim