Ti0.5Al0.5N/CrN nano-multilayers, which are known to exhibit excellent wear resistances, were prepared using the unbalanced magnetron sputter for various periods of 2–7 nm. Ti0.5Al0.5N and CrN comprised a cubic structure in a single layer with different lattice parameters; however, Ti0.5Al0.5N/CrN exhibited a cubic structure with the same lattice parameters that formed the superlattice in the nano-multilayers. The Ti0.5Al0.5/CrN multilayer with a period of 5.0 nm exceeded the hardness of the Ti0.5Al0.5N/CrN single layer, attaining a value of 36 GPa. According to the low-angle X-ray diffraction, the Ti0.5Al0.5N/CrN multilayer maintained its as-coated structure up to 700oC and exhibited a hardness of 32 GPa. The thickness of the oxidation layer of the Ti0.5Al0.5N/CrN multilayered coating was less than 25% of that of the single layers. Thus, the Ti0.5Al0.5N/CrN multilayered coating was superior in terms of hardness and oxidation resistance as compared to its constituent single layers.

Abstract
1. 서 론
2. 실험방법
    2.1 증착
    2.2 구조분석
    2.3 특성평가
    2.4 온도안정성
    2.5 응력 평가
3. 결과 및 고찰
4. 결 론
References

• 안승수(한국야금) | Seung-Su Ahn (KORLOY)
• 박종극(한국과학기술연구원) | Jong-Keuk Park (Korea Institute of Science and Technology)
• 오경식(국립안동대학교 신소재공학부 친환경신소재산업지원센터) | Kyung-Sik Oh (School of Advanced Materials Engineering, Industrial Technology Center for Environment-friendly Materials, Andong National University)
• 정태주(국립안동대학교 신소재공학부 친환경신소재산업지원센터) | Tai-Joo Chung (School of Advanced Materials Engineering, Industrial Technology Center for Environment-friendly Materials, Andong National University) Corresponding Author