As the spread of new and renewable power generation facilities, the fixed investment cost CAPEX(Capital Expenditure) of solar power generation facilities decreases due to continuous technological development, and the impact of O&M costs that determine investment success has increased. For this reason, the importance of technologies such as accuracy of O&M cost calculation through ICT, failure prediction, and predictive maintenance have emerged. In the above paper, based on the cost-breakdown structure design and failure rate model design of the solar power generation facility using engineering estimation method, the maintenance cost of the solar power generation facility, which is a renewable power generation facility, is predicted and the maintenance cost used was compared and confirmed. In addition, the cost-breakdown structure and failure rate model of solar power generation facilities were designed and developed by incorporating them into a new program of economic evaluation of new and renewable power generation facilities.