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Rapid chemical vapor deposition of graphene using methanol as a precursor KCI 등재

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  • URLhttps://db.koreascholar.com/Article/Detail/420584
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Carbon Letters (Carbon letters)
한국탄소학회 (Korean Carbon Society)
초록

In this study, graphene was rapidly grown by chemical vapor deposition using a liquid cell for supplying methanol as a carbon source of graphene. To realize the rapid growth, methanol which is carbon-contained organic solvent was used instead of methane gas, a widely used carbon source for graphene growth. The graphene grown with the growth time as a variable was transferred to a SiO2/ Si substrate with an oxide thickness of 300 nm to confirm whether it was grown with full coverage with an optical microscope. The results confirmed a full coverage in 0.5 min of growth. The Raman spectra also confirmed the G-peak position at 1585.0 cm−1 and an intensity ratio of 2D/G at 2.3 or higher. Concerning electrical transport characteristics, at an induced carrier density of 1 × 1012 cm−2, the hole (μh) and electron (μe) mobilities were 1524 cm2 V−1 s−1 and 1528 cm2 V−1 s−1, respectively. Thus, our study confirmed that high-quality, large-area graphene can be grown within 0.5 min.

목차
    Abstract
    1 Introduction
    2 Experimental
        2.1 Graphene growth
        2.2 Graphene transfer
        2.3 Characterization
    3 Results and discussion
    4 Conclusion
    Acknowledgements 
    References
저자
  • Imbok Lee(Department of Physics and GRI‑TPC International Research Center, Sejong University)
  • Jungtae Nam(Department of Physics and GRI‑TPC International Research Center, Sejong University, Carbon Convergence Materials Research Center, Institute of Advanced Composites Materials, Korea Institute of Science and Technology)
  • Sang Jun Park(Department of Physics and GRI‑TPC International Research Center, Sejong University)
  • Dong Jae Bae(Department of Physics and GRI‑TPC International Research Center, Sejong University)
  • Suklyun Hong(Department of Physics and GRI‑TPC International Research Center, Sejong University)
  • Keun Soo Kim(Department of Physics and GRI‑TPC International Research Center, Sejong University)