The carbon concentration in the carburized steels was measured by electron probe microanalysis (EPMA) for a range of soluted carbon content in austenite from 0.1 to 1.2 wt%. This study demonstrates the problems in carbon quantitative analysis using the existing calibration curve derived from pure iron (0.008 wt%C) and graphite (99.98 wt%C) as standard specimens. In order to derive an improved calibration curve, carbon homogenization treatment was performed to produce a uniform Kα intensity in selected standard samples (AISI 8620, AISI 4140, AISI 1065, AISI 52100 steel). The trend of detection intensity was identified according to the analysis condition, such as accelerating voltage (10, 15, 30 keV), and beam current (20, 50 nA). The appropriate analysis conditions (15 keV, 20 nA) were derived. When the carbon concentration depth profile of the carburized specimen was measured for a short carburizing time using the improved calibration curve, it proved to be a more reliable and accurate analysis method compared to the conventional analysis method.

Abstract
1. 서 론
2. 실험 방법
3. 결과 및 고찰
4. 결 론
Acknowledgement
References

• 권기훈(한국생산기술연구원 친환경열표면처리연구부문, 연세대학교 신소재공학과) | Gi-Hoon Kwon (Heat & Surface Technology R&D Group, Korea Institute of Industrial Technology, Department of Materials Science and Engineering, Yonsei University)
• 박현준(한국생산기술연구원 친환경열표면처리연구부문) | Hyunjun Park (Heat & Surface Technology R&D Group, Korea Institute of Industrial Technology)
• 최병호(한국생산기술연구원 친환경열표면처리연구부문) | Byoungho Choi (Heat & Surface Technology R&D Group, Korea Institute of Industrial Technology)
• 이영국(연세대학교 신소재공학과) | Young-Kook Lee (Department of Materials Science and Engineering, Yonsei University)
• 문경일(한국생산기술연구원 친환경열표면처리연구부문) | Kyoungil Moon (Heat & Surface Technology R&D Group, Korea Institute of Industrial Technology) Corresponding author