The sampling test module of the existing AMC Monitoring System is constructed using tubes and fittings, so there has been a problem with molecular contaminants remaining in the system. This study demonstrated how a new manifold-type sampling test module without connecting tubes and fittings, and with super-hydrophobic coating improves residual molecular contaminants in the AMC Monitoring System through CDA purge when molecular contamination occurs in a clean room with a Semiconductor Fabrication.

• 권혁상(한성대학교) | Hyuk-Sang Kwon (Ph.D student, Department of Smart Convergence Consulting, Hansung University) Corresponding author