Confirmation of the thermal behavior of spent fuel is one of the important points in the management of high-level radioactive waste. This is because various fission products exist in spent nuclear fuel, and a management plan according to their behavior is required. Among the fission products, epsilon particles exist in the form of metal deposits and have a great influence on their physical and chemical properties. However, observing the thermal behavior of epsilon particles is important for understanding spent fuel behavior in thermally environment, but it is difficult to maintain a consistent thermal environment. In this work, we report the thermal behaviors study of uranium oxide with epsilon particle using in situ high temperature X-ray diffraction. We measured the variation of temperature on the size of crystalline, which is a cell parameter in the reaction process. And then, the change of lattice parameters is calculated by Rietveld refinement.